Angstrom Engineering
EvoVac
The Angstrom EvoVac Electron Beam Evaporator is a load locked PVD tool which evaporates high melting point materials, such as refractory metals and ceramics, using an electron beam. The EvoVac provides multiple sources of flexibility in its deposition system including resistive thermal evaporation, ion assisted and sputter deposition, as well as principal electron beam evaporation. The EvoVac features a 6 pocket E-beam source, 15 cc crucibles, and a programmable 2-axis sweep controller.[1]
How it works
The EvoVac platform supports several deposition modes. The platform offers RF, DC, pulsed DC, HIPIMS, and reactive sputtering with circular, linear, and cylindrical cathodes. The platform also supports thermal evaporation with boats, filaments, and crucible heaters. The platform also supports electron beam evaporation with programmable sweep control, recipe storage, torque sensing on the crucible indexer, and an option for multiple electron beam sources in the chamber. The platform also offers ion sources for cleaning and film enhancement, including glow discharge plasma cleaning.[2]
What can it run?
Process applications and technology nodes documented for this tool.
- Electronic and optical semiconductor films
- Wear resistant and thermal barrier coatings
- Hard coatings for tools
What do the numbers mean?
Wafer handling7
- In-situ functions
- In-situ substrate pre-cleaning, low energy ion beam etching, and surface modification[1]
Optics & imaging3
Performance1
Control & software4
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What deposition methods can the EvoVac platform be configured for?
The EvoVac platform can be outfitted for RF, DC, pulsed DC, HIPIMS, and reactive sputtering. The EvoVac platform can also be configured for thermal evaporation, electron beam evaporation, plasma processing, and ion beam processing.[2]
Does the EvoVac support electron beam evaporation features beyond a basic source?
The EvoVac electron beam configuration includes a programmable sweep controller with recipe storage and a torque-sensing crucible indexer that detects pocket jams. The platform also offers an option for multiple electron beam sources in the chamber.[2]
Not publicly documented
The following facts about the EvoVac are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EvoVac are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EvoVac are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EvoVac are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EvoVac are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EvoVac is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]pnf.uchicago.edu — pnf.uchicago.edupnf.uchicago.edu
- [2]EvoVac Large Chamber PVD Platform — angstromengineering.comangstromengineering.com
- [3]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | Universi — colorado.educolorado.edu
Last updated Oct 20, 2026.
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