Aixtron

G 5 Plus MOCVD

Deposition Aixtron G 5 Plus MOCVD family

Research Quality: 20% complete

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G 5 Plus MOCVD — Inventory photo — Fig. 01G 5 Plus MOCVDInventory photo^[1]

Power

Process module 208VAC, RF Generator 480VAC^[1]

Vacuum

Single filter exhaust CT500^[1]

Gas delivery

Horiba MFC's^[1]

What is it?

What do the numbers mean?

Power & electrical2

Process module 208VAC, RF Generator 480VAC^[1]

Accurate?

USA Voltage^[1]

Accurate?

Vacuum & pumping3

Single filter exhaust CT500^[1]; Ebara ESA80 process pump^[1]
Two scroll pumps: for the glove box (1) and the Antechamber (1)^[1]

Wafer handling2

Possible to run (QTY: 5) 8" wafers^[1]; No transfer modules^[1]

Gas & chemistry1

Horiba MFC's^[1]

Accurate?

Configuration & options5

Penta Injector^[1]

Accurate?

EpiTT Version 1^[1]

Accurate?

TMGax2, TMAlx2, Cp2Mg^[1]

Accurate?

H2, N2, Nh3,Cl2 (no mixer) that was external of the system^[1]

Accurate?

Aixact version 7.1.2.8^[1]

Accurate?

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationSingle filter exhaust CT500^[1]
ConfigurationEbara ESA80 process pump^[1]
Two scroll pumpsfor the glove box (1) and the Antechamber (1)^[1]
ConfigurationHoriba MFC's^[1]
ConfigurationProcess module 208VAC, RF Generator 480VAC^[1]
ConfigurationUSA Voltage^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the G 5 Plus MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G 5 Plus MOCVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the G 5 Plus MOCVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the G 5 Plus MOCVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the G 5 Plus MOCVD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the G 5 Plus MOCVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report