Applied Materials

PI 9500 Ion

Ion Implantation Applied Materials PI 9500 family

Research Quality: 20% complete

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PI 9500 Ion — Inventory photo — Fig. 01PI 9500 IonInventory photo^[1]

Power

60 Hz^[1]

Vacuum

Leybold Turbo pumps^[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

Rear cryo compressor missing
Wafer Loader Blade Control PCB missing
Spin Control PCB missing
Spin/Scan Control PCB missing
MRS turbo missing
PFG Argon feed through missing
Rear Cryo missing
Spin Motor gear/coupler missing
Blade carriage bearing arm missing
Front monitor missing
Isolation Transformer Breaker (term PD) missing
Scan arm work missing
PFG Filament PSU missing
Filament PSU missing
Beam stop Shield Interlock switch missing
Wheel Index PCB (Wheel Chamber) missing
Two Wheel chamber Plexiglas windows missing
Wafer on Blade sensor missing
Fast Wheel Index Sensor missing
Gas Modules missing
TFT monitor upgrade missing

What do the numbers mean?

Power & electrical2

Frequency: 60 Hz^[1]; Ebara A07V Mech pump^[1]

Vacuum & pumping2

Leybold Turbo pumps^[1]

Accurate?

CTI Cryo pump, rear cryo compressor missing, 9600 model^[1]

Accurate?

Wafer handling1

Wafer cassette: 26 wafers^[1]

Control & software1

Factory interface: SECS / GEM^[1]

Configuration & options14

Belt Drive^[1]
Utilities: Top feed^[1]
Water fittings: Imperial^[1]
Remote distance: 6m umbilical^[1]
Layout: Thru wall^[1]
Helium line length: 15 m^[1]
Tilt angle: Variable 0-7 degree^[1]; Standard 25 wfr wheel^[1]
Plasma Flood System: HDPFS^[1]
Beamline: Standard^[1]
Source type: Bernas^[1]
Front plate: Tungsten^[1]
Extraction type: Single bellows^[1]; Source chamber liners^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency60 Hz^[1]
ConfigurationLeybold Turbo pumps^[1]
ConfigurationEbara A07V Mech pump^[1]
ConfigurationCTI Cryo pump, rear cryo compressor missing, 9600 model^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the PI 9500 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PI 9500 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PI 9500 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PI 9500 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PI 9500 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PI 9500 Ion are on record.
Answerable by: an OEM parts catalog or a service engineer