Waferpedia

Manufacturer

Axcelis

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99 entries

  1. 17370620Axcelis

    The Axcelis 17370620 is a pump chamber used with the Axcelis GSD 200.

  2. Fusion M 200 PC UVAxcelis

    The Axcelis Fusion M 200 PC is a UV cure system for semiconductor wafer processing.

    CategoryThermal / Diffusion
  3. Fusion 200Axcelis
  4. NV GSD HEAxcelis

    The Axcelis NV GSD HE is an ion implantation system that can handle 6-inch and 8-inch wafers.

    CategoryIon ImplantationWafer8"
  5. HE 3Axcelis
  6. NV 8250 IonAxcelis
    CategoryIon Implantation
  7. IntegraAxcelis
    CategoryEtch
  8. NV 10 Silicone Vacuum CupAxcelis
  9. NV 6200Axcelis
    CategoryIon Implantation
  10. RapidStrip 210 ESAxcelis

    Axcelis RapidStrip 210 ES is an etcher/asher system configured for 8-inch wafers.

    CategoryEtch
  11. Purion H 200 High CurrentAxcelis
    CategoryIon Implantation
  12. GSD 200 E High CurrentAxcelis
    CategoryIon Implantation
  13. GSD 100 High CurrentAxcelis
    CategoryIon Implantation
  14. RapidStrip 210 ES StripperAxcelis
  15. Fusion M 200 PCU UVAxcelis
    CategoryThermal / Diffusion
  16. MUAxcelis

    The Axcelis MU is an asher used in semiconductor manufacturing.

  17. NV GSD High EnergyAxcelis
    CategoryIon Implantation
  18. GSD HE High EnergyAxcelis
    CategoryIon Implantation
  19. NV GSD III LE High Current IonAxcelis
    CategoryIon Implantation
  20. NV GSD III 90 IonAxcelis
    CategoryIon Implantation
  21. ACU 200Axcelis
  22. NV GSD 200Axcelis

    The Axcelis NV GSD 200 is an ion implanter described with 208 V, 3 phase, 50/60 Hz power and 35 kVa input.

    CategoryIon Implantation
  23. NV 8200 PAxcelis
    CategoryIon Implantation
  24. 8200 PAxcelis
  25. NV GSD A 80 IonAxcelis
    CategoryIon Implantation
  26. P/N 1952-0047-0001 LensAxcelis
    CategoryPrecision Optics
  27. Optima MD IonAxcelis
    CategoryIon Implantation
  28. RapidCure 320 FC Radiator UV AnnealAxcelis
    CategoryThermal / Diffusion
  29. Optima HDx High CurrentAxcelis
    CategoryIon Implantation
  30. 200 PC ExposureAxcelis
    CategoryLithography
  31. NV 10 SD 160 IonAxcelis
    CategoryIon Implantation
  32. P/N 0692-0006-0001 ESC Brush AssemblyAxcelis

    Axcelis P/N 0692-0006-0001 is an ESC Brush Assembly for ion implanters.

  33. ES 3 ProcessAxcelis
  34. M 150 PC UVAxcelis
    CategoryThermal / Diffusion
  35. NV 8250Axcelis
    CategoryIon Implantation
  36. NV GSD 200 E 2Axcelis
  37. GSD 200 EAxcelis
    CategoryIon Implantation
  38. Integra RSAxcelis
    CategoryDeposition
  39. RapidCure 320 FC RPCAxcelis
    CategoryThermal / Diffusion
  40. FBF 0102 AD 10 050 B FiltrationAxcelis
  41. Purion M IonAxcelis
    CategoryIon Implantation
  42. ISO 250 SST FlangeAxcelis
  43. OEM# 17099370 Outer strike plateAxcelis
  44. 200 MCU ExposureAxcelis
    CategoryLithography
  45. 9 PX 11000Axcelis
  46. VHEAxcelis

    The Axcelis VHE is an ion implanter described as a 6"-8" wafer convertible system.

    CategoryIon ImplantationWafer8"
  47. F 300 S & P 300 MT UVAxcelis
  48. NV GSD VHEAxcelis
    CategoryIon ImplantationWaferWafer tilt
  49. P/N 0399-0025-0001 Beam Dump BaffleAxcelis

    Axcelis P/N 0399-0025-0001 is a Beam Dump Baffle for ion implanters.

  50. NV 8200Axcelis
    CategoryIon ImplantationWafer200mm
  51. NV GSD HE IonAxcelis
    CategoryIon ImplantationWafer6"
  52. MCU 200Axcelis
    CategoryEtch
  53. 200 MCUAxcelis

    The Axcelis 200 MCU is an 8-inch asher.

  54. M 200 PCUAxcelis
  55. NV 6200 A IonAxcelis

    The Axcelis NV 6200 A Ion Implanter is a 6-inch wafer ion implanter.

    CategoryIon Implantation
  56. M 200 PCU UVAxcelis
    CategoryThermal / Diffusion
  57. P/N 1952-0042-0001Axcelis
  58. P/N 0952-0241-0001Axcelis
  59. P/N 0295-0091-0001 Source HSG ApertureAxcelis
  60. 200 PCUAxcelis