Bruker
Dektak 150 High Performance Surface Profiler
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Dektak 150 is a contact stylus surface profiler manufactured by Bruker (formerly Veeco). The Dektak 150 provides two-dimensional surface profile measurements with a standard scan length of 55 mm and a vertical range of 524 μm. The Dektak 150 achieves step height repeatability of ≤6 Å (≤4 Å with the optional D150+ electronics).[1]
What is it?
What do the numbers mean?
Vacuum & pumping1
- Sample Stage
- Manual X/Y/θ, 100 x 100 mm X-Y translation, 360° rotation, manual leveling; optional X-Y auto stage 150 mm travel, 1 μm repeatability; optional 200 mm wafer vacuum chuck; optional 6-inch square porous vacuum chuck[1]
Wafer handling1
Optics & imaging2
- Stylus Options
- Radius options from 50 nm to 25 μm; HAR tips 10 μm x 2 μm and 200 μm x 20 μm[1]
Performance1
Control & software2
- Software
- Dektak software running under Windows XP; Step Detection software (std.); optional Stress Measurement software; optional 3D Mapping with Vision analysis software; optional Stitching software[1]
Dimensions & facilities2
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Dektak 150+ | — | — | Includes low-noise electronics for 4 Å step height repeatability (D150+ option) | dp-pimm.s3.ensam.eu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Sample StageManual X/Y/θ, 100 x 100 mm X-Y translation, 360° rotation, manual leveling; optional X-Y auto stage 150 mm travel, 1 μm repeatability; optional 200 mm wafer vacuum chuck; optional 6-inch square porous vacuum chuck[1]
Where are the manuals?
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Not publicly documented
Field notes
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Not publicly documented
The following facts about the Dektak 150 High Performance Surface Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 150 High Performance Surface Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Dektak 150 High Performance Surface Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dektak 150 High Performance Surface Profiler are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dektak 150 High Performance Surface Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Dektak 150 High Performance Surface Profiler are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]dp-pimm.s3.ensam.eu — dp-pimm.s3.ensam.eudp-pimm.s3.ensam.eu
- [2]Equipment inventory listing
Last updated Aug 20, 2026.
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