Waferpedia

CEE

200XD

Develop spinnerup to 6 in wafersCEE 200XD family
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CEE200XD
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What is it?

The CEE 200XD Develop Spinner is listed as a lithography spin coater/develop spinner in the cleanroom equipment pages. The source identifies it as model CEE 200XD, with tool owner Brian Baker and serial number 2122257.

What can it run?

Process applications and technology nodes documented for this tool.

  • Lithography

What do the numbers mean?

Wafer handling1

Wafer capacity
Accepts up to 6 in wafers[2]
Accurate?

Configuration & options4

Model
CEE 200XD[1]
Accurate?
Tool type
Develop Spinner[1]
Accurate?
Tool owner
Brian Baker[1]
Accurate?
Serial number
2122257[1]
Accurate?
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What replaced it?

  • siblingCEE 100— Listed in the same lithography spin coater group.source[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 200XD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200XD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 200XD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 200XD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 200XD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 200XD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
  3. [3]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
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Last updated Jul 29, 2026.