Waferpedia

Disco

DFD 8540

Dicing & Grinding
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Disco DFD 8540 is a grinder manufactured by Disco.[1]

DiscoDFD 8540
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What it is

The Disco DFD 8540 is a wafer grinder used in semiconductor manufacturing for backside thinning of wafers.[1]

How it works

General reference — not yet source-verified

A wafer grinder holds the wafer on a vacuum chuck and brings it into contact with a rotating grinding wheel embedded with abrasive diamond grit.

The grinding process removes material from the wafer backside in a controlled manner, often using coarse and fine grinding stages to achieve the target thickness and surface finish.

Where it fits in the process flow

General reference — not yet source-verified

Wafer grinding is performed after front-end wafer fabrication and before dicing, typically as part of the back-end or packaging flow.

Upstream steps include wafer fabrication and possibly temporary bonding to a carrier wafer; downstream steps include dicing, die attach, and encapsulation.

Applications

General reference — not yet source-verified

Wafer grinders are used to thin wafers for a variety of applications including memory devices, logic circuits, power semiconductors, MEMS, and image sensors.

Thinning is critical for stacked-die packages, where multiple thinned dies are assembled vertically to reduce package footprint and improve electrical performance.

What do the numbers mean?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the DFD 8540 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the DFD 8540 are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 8540 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFD 8540 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFD 8540 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFD 8540 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Aug 20, 2026.

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