EV Group

150

Deposition EV Group 150 family

Research Quality: 40% complete

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150 — Inventory photo — Fig. 01150Inventory photo^[1]

Vacuum

2x Cybor pumps^[1]

Gas delivery

Chemistry cabinet^[1]

What is it?

The EVG 150 Coater is a spin-on and spray-on coating system with chemistry cabinet, EBR/BSR, multiple pumps, two stations, and heated/chilled plates.

What do the numbers mean?

Vacuum & pumping3

2x Cybor pumps^[1]

Accurate?

1x Syringe pump^[1]

Accurate?

1x high viscosity pump^[1]

Accurate?

Gas & chemistry1

Chemistry cabinet^[1]

Accurate?

Configuration & options6

Spin-on + spray-on module^[1]; EBR, BSR^[1]; 2 stations^[1]; 5x hot plates^[1]
Temperature: 1x hot plate 350°C^[1]; 1x chill plate^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationChemistry cabinet^[1]
Configuration2x Cybor pumps^[1]
Configuration1x Syringe pump^[1]
Configuration1x high viscosity pump^[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

EVG610 BrochureDatasheettamu.edu

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Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report