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Filmetrics

F30

thin-film thickness measurement instrumentFilmetrics F30 family
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F30 — web.archive.org
Fig. 01F30web.archive.org[1]

What is it?

The Filmetrics F30 is described as a spectral reflectance system for monitoring thin-film deposition in real time. The sources state that it measures deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers, and that it can measure smooth and translucent or lightly absorbing films, including semiconducting materials from AlGaN to GaInAsP.

What can it run?

Process applications and technology nodes documented for this tool.

  • thin-film deposition monitoring
  • semiconductors
  • dielectric layers
  • MOCVD

What do the numbers mean?

Optics & imaging1

measurements
deposition rates, layer thickness, optical constants (n and k), and uniformity[1]
Accurate?

Control & software1

software
Intuitive Windows software[1]
Accurate?

Configuration & options5

measurement method
spectral reflectance system[1]
Accurate?
target materials
semiconductors and dielectric layers[1]
Accurate?
measurement context
real-time thin-film deposition monitoring[1]
Accurate?
film types mentioned
smooth and translucent, or lightly absorbing films[1]
Accurate?
example materials
virtually any semiconducting material, from AlGaN to GaInAsP[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F30 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F30 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F30 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F30 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F30 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F30 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]Filmetrics F30 System — premier-sols.compremier-sols.com
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Last updated Jul 29, 2026.

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