Filmetrics

F20-EXR

thin-film thickness measurement instrument Filmetrics F20-EXR family

Research Quality: 50% complete

The Filmetrics F20-EXR is a thin-film thickness measurement instrument. The Filmetrics F20-EXR uses spectral reflectance. The Filmetrics F20-EXR has a 400-1700 nm wavelength range.^[1]^[2]

FilmetricsF20-EXR

No photo available yet

Plate 01How to Measure Film Thickness using the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTube
Plate 02F20 Hardware Installation
FilmetricsWatch on YouTube
Plate 03How to Set Up the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTube
Plate 04Filmetrics F20 System
Solutions PremierWatch on YouTube
Plate 05How to Change the Lamp on the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTube
Plate 06F20-UV Hardware Installation
FilmetricsWatch on YouTube

What it is

The Filmetrics F20-EXR is a thin-film thickness measurement instrument that uses spectral reflectance. The F20-EXR is designed for measuring ITO (indium tin oxide) and other transparent conductive oxides, as well as for analyzing layers in flat-panel displays. The instrument operates over a wavelength range of 400 to 1700 nm and incorporates a proprietary ITO dispersion model to enable one-click analysis of ITO thickness.^[1]^[2]

How it works

General reference — not yet source-verified

Spectral reflectance instruments direct broadband light onto a sample and measure the intensity of the reflected light across a range of wavelengths. The resulting interference pattern is analyzed by fitting it to an optical model of the film stack to determine layer thickness and optical constants (refractive index and extinction coefficient).

Where it fits in the process flow

General reference — not yet source-verified

Thin-film thickness measurement instruments like the F20-EXR are used in process development and quality control in industries that deposit thin films. In a typical process flow, the instrument is used after film deposition to verify thickness and uniformity, and before subsequent process steps such as etching, patterning, or encapsulation.

What can it run?

Process applications and technology nodes documented for this tool.

ITO thickness measurement
transparent conductive oxide measurement
display-layer analysis
liquid crystal layer thickness measurement
polyimide thickness measurement
hardcoat thickness measurement
OLED layer measurement
emission layer measurement
injection layer measurement
buffer layer measurement
encapsulation layer measurement

What do the numbers mean?

Optics & imaging1

Wavelength range: 400-1700 nm^[1]2 sources

Configuration & options3

Measurement method: spectral reflectance^[1]2 sources
Analysis mode: one-click analysis of ITO thickness^[1]2 sources
Model context: uses a new ITO dispersion model^[1]2 sources

Interested in this tool?

Need help with this tool?Embed spec card

What replaced it?

siblingFilmetrics F40— For patterned films, the source says the F40 is used for measuring film thickness in display applications.source^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What measurement method does the Filmetrics F20-EXR use?

The Filmetrics F20-EXR uses spectral reflectance.^[1]^[2]

What wavelength range does the Filmetrics F20-EXR cover?

The Filmetrics F20-EXR operates over a 400-1700 nm wavelength range.^[1]^[2]

What materials is the Filmetrics F20-EXR designed to measure?

The Filmetrics F20-EXR is designed for measuring indium tin oxide and other transparent conductive oxides.^[1]^[2]

What display-related layers can the Filmetrics F20-EXR analyze?

The Filmetrics F20-EXR can analyze remaining display layers after the ITO layer is characterized, including liquid crystal, polyimide, hardcoat, and OLED emission, injection, buffer, and encapsulation layers.^[1]^[2]

Not publicly documented

The following facts about the F20-EXR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F20-EXR are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F20-EXR are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F20-EXR are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F20-EXR are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F20-EXR is not on record.
Answerable by: an OEM datasheet or a fab qualification report