Hitachi
S4700
The Hitachi S4700 is a field emission scanning electron microscope. The Hitachi S4700 is a variable voltage SEM with EDX capabilities. The Hitachi S4700 has a eucentric stage for sample sizes up to 4 inches in diameter.[1][2][3]
Plate 01Loading a sample into the Hitachi S4700 Scanning Electron Microscope
Bioimaging FacilityWatch on YouTubePlate 02HITACHI S-4700 SCANNING ELECTRON MICROSCOPE , SEM semiconductor equipment
SemiStarWatch on YouTubePlate 03Removing a sample from the Hitachi S4700 Scanning Electron Microscope
Bioimaging FacilityWatch on YouTubePlate 04Mounting a sample for the Hitachi S4700 Scanning Electron Microscope
Bioimaging FacilityWatch on YouTube
Wafer size
4"
Power
variable voltage SEM[1]
What it is
The Hitachi S4700 is a field emission scanning electron microscope. The Hitachi S4700 is a variable voltage SEM with EDX capabilities. The Hitachi S4700 has a eucentric stage for sample sizes up to 4 inches in diameter.[1][3]
How it works
General reference — not yet source-verifiedA field emission scanning electron microscope forms images by scanning a focused electron beam across a sample and detecting signals generated from the surface region. Field emission electron sources are used in this class of instrument to provide a fine probe for detailed imaging. Variable accelerating conditions in this class of instrument help balance surface sensitivity, charging behavior, and image contrast. An eucentric stage in this class of instrument keeps a selected feature near the beam focus and observation point while the sample is tilted or rotated. Energy dispersive x ray analysis in this class of instrument measures characteristic x rays emitted from the sample to indicate elemental composition.
Where it fits in the process flow
Applications
The Hitachi S4700 supports detailed image analysis of devices and circuits. The Hitachi S4700 also supports EDX elemental analysis capability.[1][2]
- detailed image analysis
- devices
- circuits
- characterization
What do the numbers mean?
Power & electrical1
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- modevariable voltage SEM[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the S4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S4700 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S4700 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S4700 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S4700 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S4700 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [2]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.