Waferpedia

Hitachi

S4700

characterization equipment4"Hitachi S4700 family
Research Quality: 30% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

  • Plate 01Loading a sample into the Hitachi S4700 Scanning Electron Microscope

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  • Plate 02HITACHI S-4700 SCANNING ELECTRON MICROSCOPE , SEM semiconductor equipment

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  • Plate 03Removing a sample from the Hitachi S4700 Scanning Electron Microscope

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  • Plate 04Mounting a sample for the Hitachi S4700 Scanning Electron Microscope

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Wafer size

4"

Power

variable voltage SEM[1]

What is it?

The sources identify the Hitachi S-4700 as a variable voltage SEM / FESEM used for detailed image analysis of devices and circuits, with EDX capabilities. One source states it has a eucentric stage for sample sizes up to 4" diameter.

What can it run?

Process applications and technology nodes documented for this tool.

  • detailed image analysis
  • devices
  • circuits
  • characterization

What do the numbers mean?

Power & electrical1

mode
variable voltage SEM[1]
Accurate?

Configuration & options5

tool type
field emission scanning electron microscope (FESEM)[1]
Accurate?
analysis capability
EDX / EDX elemental analysis capabilities[1]
Accurate?
stage
eucentric stage[1]
Accurate?
sample size
up to 4" diameter[1]
Accurate?
usage
used for detailed image analysis of devices and circuits fabricated in the NanoFab[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • modevariable voltage SEM[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the Hitachi S-4700?

It is a field emission scanning electron microscope.[2]

What is the Hitachi S-4700 used for?

It is used for detailed image analysis of devices and circuits fabricated in the NanoFab.[2]

What sample size can it handle?

It has a eucentric stage for sample sizes up to 4 inches in diameter.[1]

Not publicly documented

The following facts about the S4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S4700 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S4700 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S4700 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S4700 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S4700 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
  2. [2]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
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Last updated Jul 29, 2026.