Keysight
5517 A
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Power
316 MHz[3]
Vacuum
2 ppb (1 hour); 20 ppb (lifetime)[3]
Performance
Precision dual-frequency interferometry[3]
Optics
Class II helium-neon laser[3]
What it is
General reference — not yet source-verifiedInterferometer lasers are precision optical sources used as part of displacement metrology systems. Interferometric metrology systems provide stable optical references for position measurement in equipment that depends on controlled motion and fine alignment.
How it works
The Keysight 5517 A is specified for precision dual-frequency interferometry. The Keysight 5517 A uses a Class II helium-neon laser. The Keysight 5517 A has a wavelength of 633 nm. The Keysight 5517 A has a reference frequency of 316 MHz.[4]
Where it fits in the process flow
General reference — not yet source-verifiedPrecision optics equipment of this class fits into the metrology and motion-control layer of semiconductor manufacturing tools rather than into a direct material deposition or removal step. Such laser heads are integrated into equipment that requires precise stage positioning, alignment feedback, or verification of controlled movement during operation.
Applications
General reference — not yet source-verifiedInterferometric laser systems are used where equipment must measure displacement with very high sensitivity and repeatability. Common application patterns for this class include stage position measurement, alignment-related feedback, and geometric motion verification in precision manufacturing and inspection platforms.
What do the numbers mean?
Power & electrical3
Vacuum & pumping1
Optics & imaging7
Performance1
Configuration & options12
- Compatible with ASML PAS 2500 / 5000 Part Number: 4022 502 25005[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement approach is the Keysight 5517 A used for?
The Keysight 5517 A is specified for precision dual-frequency interferometry.[4]
What laser type and wavelength are given for the Keysight 5517 A?
The Keysight 5517 A is specified as a Class II helium-neon laser with a wavelength of 633 nm.[4]
What reference frequency is given for the Keysight 5517 A?
The Keysight 5517 A is specified with a reference frequency of 316 MHz.[4]
Not publicly documented
The following facts about the 5517 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5517 A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5517 A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5517 A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5517 A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5517 A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]keysight.comkeysight.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
Compare with similar tools
View all →
The OGP 0020 Contour Projector is a precision optics contour projector made by OGP (Optical Gaging Products).
The Perkin Elmer 1050 UV-VIS Spectrometer is an instrument used for analyzing ultraviolet and visible light absorption spectra.
The Agilent 11980 A is a fiber optic interferometer for precision optical measurements.