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KLA

OP 2690 Film Thickness Measurement

KLA OP 2690 Film Thickness Measurement family
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The KLA OP 2690 Film Thickness Measurement is a film thickness measurement system. The KLA OP 2690 Film Thickness Measurement is designed for semiconductor wafer processing. The KLA OP 2690 Film Thickness Measurement is configured for 200-millimeter (8-inch) wafer diameters.[1][2]

KLAOP 2690 Film Thickness Measurement
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What it is

The KLA OP 2690 is a film thickness measurement system designed for semiconductor wafer processing. The system is configured for 200-millimeter (8-inch) wafer diameters.[2][1]

What do the numbers mean?

Wafer handling2

Wafer Size
8 inch[2]
Accurate?
Wafer diameter
200-millimeter (8-inch)[1]
Accurate?

Configuration & options3

Manufacturer
KLA[1]
Accurate?
Model
OP 2690[2]
Accurate?
Equipment type
Film Thickness Measurement System[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the KLA OP 2690?

The KLA OP 2690 is a film thickness measurement system.[2][1]

What is the KLA OP 2690 used for?

The KLA OP 2690 is used for semiconductor wafer processing as a film thickness measurement system.[1]

What wafer size is the KLA OP 2690 configured for?

The KLA OP 2690 is configured for 8 inch wafers.[2][1]

Not publicly documented

The following facts about the OP 2690 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OP 2690 Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the OP 2690 Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OP 2690 Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OP 2690 Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OP 2690 Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
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Last updated Oct 20, 2026.

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