KLA
UV 1050 Thin Film Measurement
The KLA UV 1050 is a thin film measurement system used for measuring thin films on 8-inch wafers. The KLA UV 1050 is classified as legacy equipment.[1]
Plate 01KLA-Tencor Prometrix UV-1050 Thin Film Measurement System (ID# 4308)
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What it is
The KLA UV 1050 is a model of thin film measurement system manufactured by KLA. One configuration of the UV 1050 accepts wafers of 8 inch diameter.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Focus adjustments are taking longer than expected.
- A solenoid for the field illumination shutter was fitted, but could not be connected electronically and requires a specific Molex connector.
What do the numbers mean?
Power & electrical1
Wafer handling3
Optics & imaging3
Control & software1
- PCIF PCB and Turret Control PCB fitted from 1050-2 X,Y,Z stage PM[3]
Dimensions & facilities1
- Power and CDA is blue LOTO'd[7]
Configuration & options16
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- KLA PN28-0115 Xenon Lamp Power Supply Removed[7]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the UV 1050 Thin Film Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UV 1050 Thin Film Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UV 1050 Thin Film Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UV 1050 Thin Film Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the UV 1050 Thin Film Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UV 1050 Thin Film Measurement are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]inventory listing
- [9]Equipment inventory listing
- [10]waferpedia.com — waferpedia.comwaferpedia.com
- [11]https://www.ptwsingapore.com/img/products/prometrix_uv1050_970171uv1050/prometrix_uv1050_970171uv1050.pdf — ptwsingapore.comptwsingapore.com
Last updated Oct 20, 2026.
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