Lam Research
Alliance 9400
Provisional entry — research in progress
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The Lam Research Alliance 9400 is an 8-inch semiconductor etching device. The Alliance 9400 PTX variant includes two plasma etch chambers, while the Alliance 9400 DFM variant includes four chambers.[1][2][3]
How it works
The system can be configured with multiple etch chambers. The PTX variant has two plasma etch chambers, while the DFM variant is a dry etcher with four chambers, typically used for poly silicon etching. Fault detection and classification (FDC) data from the chambers, such as RF matcher values, gas flows, and endpoint signals, are collected for process monitoring.[2][3][1]
Applications
The system generates fault detection and classification (FDC) data, which is used to monitor etch parameters and ensure process quality. The FDC data includes trends for top RF matcher, etching gas flow, bottom RF matcher, ESC, and endpoint, enabling real-time fault detection and yield improvement.[1]
What do the numbers mean?
Wafer handling1
Configuration & options6
Vintage & configurations
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the Alliance 9400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance 9400 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Alliance 9400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance 9400 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alliance 9400 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Alliance 9400 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]ieeexplore.ieee.org — ieeexplore.ieee.orgieeexplore.ieee.org
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]Equipment inventory listing
Last updated Sep 1, 2026.
