Lam Research
Gasonics Vector
What is it?
What do the numbers mean?
Power & electrical3
Wafer handling4
Gas & chemistry1
- Gas Box[1]
Control & software4
Configuration & options10
- SiN Oxide[2]
- UV Cure[3]
- 2x FOUP Loadports[1]
- Mini-Environment (Front End)[1]
- Light Tower[1]
- Al Heater Pedestals with lift pins (station 1)[1]
- Al Heater Pedestals (stations 2-4)[1]
- Pneumatic Spindle[1]
- Integrated Liquid Delivery System (not on this particular configuration)[1]
- Local Power Box[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Gasonics Vector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Vector are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Vector are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Vector are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Vector are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Vector is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Jul 29, 2026.
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