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Leybold

Turbovac 150 Turbomolecular

Leybold Turbovac 150 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Leybold Turbovac 150 Turbomolecular is a turbomolecular pump. The Leybold Turbovac 150 Turbomolecular has a pumping speed of 150 l/s. The Leybold Turbovac 150 Turbomolecular has an ultimate pressure of -8 mbar.[1][2]

Turbovac 150 Turbomolecular — Inventory photo
Fig. 01Turbovac 150 TurbomolecularInventory photo[3]

What it is

The Leybold Turbovac 150 is a turbomolecular pump.[3]

What do the numbers mean?

Vacuum & pumping3

Type
turbomolecular pump[1]
Accurate?
Pumping speed
150 l/s[2]
Accurate?
Ultimate pressure
-8 mbar[2]
Accurate?

Configuration & options2

CSV 85502[3]
Accurate?
Configuration / option code
CSV 85502[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Typeturbomolecular pump[1]
  • Pumping speed150 l/s[2]
  • Ultimate pressure-8 mbar[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Leybold Turbovac 150?

The Leybold Turbovac 150 is a turbomolecular pump.[3][1][2]

Not publicly documented

The following facts about the Turbovac 150 Turbomolecular are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Turbovac 150 Turbomolecular are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Turbovac 150 Turbomolecular are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Turbovac 150 Turbomolecular are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Turbovac 150 Turbomolecular are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Turbovac 150 Turbomolecular is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]ptbsales.com — ptbsales.comptbsales.com
  3. [3]Inventory photo
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Last updated Oct 19, 2026.

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