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Meyer Burger

TS 23 ID

Dicing & GrindingMeyer Burger TS 23 ID family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Meyer Burger TS 23 ID Saw is an inner-diameter saw used in semiconductor dicing processes.[1][2][3][4]

TS 23 ID — Inventory photo
Fig. 01TS 23 IDInventory photo[3]

What it is

General reference — not yet source-verified

An ID saw is a precision cutting machine used to slice brittle materials with a circular blade whose cutting edge is formed on the inner diameter. ID saws are commonly used where controlled kerf, stable blade geometry, and careful handling of hard or fragile workpieces are important.

How it works

General reference — not yet source-verified

An ID saw operates by rotating a tensioned ring blade and feeding the workpiece into the blade opening so the inner cutting edge performs the cut. ID saws generally use precise fixturing, controlled feed motion, and coolant during cutting to manage heat, debris, and edge quality.

Where it fits in the process flow

General reference — not yet source-verified

ID sawing is typically a singulation or slicing step that follows crystal growth, ingot preparation, or substrate preparation, depending on the product being made. ID sawing generally precedes lapping, grinding, polishing, cleaning, inspection, or downstream assembly steps that require dimensioned pieces or separated parts.

Applications

General reference — not yet source-verified

ID saws are used for precision cutting of brittle crystalline and ceramic materials in semiconductor and related manufacturing. ID saws are commonly applied where wafers, bars, blocks, or substrates must be sectioned with controlled damage and consistent geometry before later thinning or finishing operations.

What do the numbers mean?

Configuration & options8

Refurbished in 2020[3]
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Make
Meyer Burger[1]
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Model
TS 23[1]
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Equipment type
ID Saw[1]
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Vintage (one unit)
1985[3]
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Refurbished (one unit)
Refurbished in 2020[3]
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OEM
Meyer Burger[1]
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Equipment type
Saw[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the equipment designation?

The equipment is designated as the Meyer Burger TS 23 ID Saw.[1][2][3][4]

Who is the manufacturer?

The manufacturer is Meyer Burger.[1][2][3][4]

Not publicly documented

The following facts about the TS 23 ID are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS 23 ID are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TS 23 ID are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TS 23 ID are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TS 23 ID are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TS 23 ID is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Inventory photo
  4. [4]Inventory photo
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Last updated Oct 19, 2026.

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