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Nanoscribe

Photonic Professional GT

LithographyNanoscribe Photonic Professional GT family
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Photonic Professional GT — epfl.ch
Fig. 01Photonic Professional GTepfl.ch[1]

Performance

lower than 1.5 µm[1]

Optics

780 nm[1]

What is it?

The Photonic Professional GT+ is described as a 3D nanoprinter that uses two-photon absorption from an infrared 780 nm femtosecond laser to expose and polymerize UV-sensitive photoresists. The source lists multiple objective configurations, including 20x air and 10x, 25x, and 63x immersion objectives, as well as several DILL and oil-immersion operating modes and standard sample holder formats including 4-inch and 2-inch wafers.

What can it run?

Process applications and technology nodes documented for this tool.

  • two-photon polymerization
  • photopolymerization of UV-sensitive photoresists
  • DILL writing
  • alignment on existing wafer/sample topography

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • The objectives are described as extremely sensitive and expensive.
  • The equipment is described as sensitive to vibrations.

What do the numbers mean?

Wafer handling1

Standard substrates
quartz, silicon, ITO-coated glass, 170 µm-thick borosilicate, microscope slides up to 26 x 76 mm, 4 inch wafers, 2 inch wafers[1]
Accurate?

Optics & imaging10

Laser wavelength
780 nm[1]
Accurate?
Laser type
femtosecond laser[1]
Accurate?
Objectives
20x (air), 10x (immersion), 25x (immersion), 63x (immersion)[1]
Accurate?
63x objective resolution
< 200 nm lateral dimensions; < 700 nm z-height[1]
Accurate?
25x objective resolution
< 600 nm x-/y- diameter; < 2 µm z-height[1]
Accurate?
10x objective resolution
< 1.2 µm x-/y- diameter; < 6 µm z-height[1]
Accurate?
20x objective resolution
< 800 nm x-/y- diameter; < 5 µm z-height[1]
Accurate?
High-resolution mode objective
63x NA1.4, 360 µm working distance[1]
Accurate?
Micro- to mesoscale mode objective
25x NA0.8, 380 µm working distance[1]
Accurate?
FAST macroscale mode objective
10x NA0.3, 700 µm working distance[1]
Accurate?

Performance1

Coarse stage precision
lower than 1.5 µm[1]
Accurate?

Configuration & options3

Machine type
3D nanoprinter[1]
Accurate?
Process
two-photon absorption[1]
Accurate?
Piezo-stage travel range
300 µm in all directions[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Photonic Professional GT+——The source describes GT+ as the model with multiple objectives, DILL configurations, oil-immersion options, and Describe software support.epfl.ch[1]
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Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Photonic Professional GT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Photonic Professional GT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Photonic Professional GT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Photonic Professional GT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Photonic Professional GT are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • The operating principle of the Photonic Professional GT is not documented in this record.

    Answerable by: an equipment physicist or OEM application engineer

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]epfl.ch — epfl.chepfl.ch
  2. [2]Nanoscribe 3D Photonic Pro GT | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
  3. [3]Tool Details - Harvard CNS — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
  4. [4]Manual — ncf.uic.eduncf.uic.edu
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Last updated Jul 29, 2026.

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