Waferpedia

Nikon

S 306 C

LithographyNikon S 306 C family
Research Quality: 30% complete
S 306 C — Inventory photo
Fig. 01S 306 CInventory photo[1]

What is it?

The Nikon S 306 C is an 8-inch lithography scanner with ArF excimer laser exposure at 193 nm.

What do the numbers mean?

Optics & imaging6

Arf Wavelength
193 nm[1]
Accurate?
Resolution ≤ 100 nm[2]
Accurate?
Exposure source ArF excimer laser (193 nm wavelength)[2]
Accurate?
Reduction magnification 1
4[2]
Accurate?
Maximum exposure range 25 × 33 mm[2]
Accurate?
Overlap accuracy (EGA, |M| + 3σ) ≤ 20 nm[2]
Accurate?

Configuration & options1

NA 0.78[2]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the S 306 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 306 C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 306 C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 306 C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 306 C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 306 C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Nikon Precision Inc.nikonprecision.com (Dec 30, 2003)web.archive.org
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →