Novellus
3290 STQ
What is it?
What do the numbers mean?
Power & electrical6
Vacuum & pumping4
Gas & chemistry1
- Upgrade to MFC vs. needle valve[1]
Control & software2
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[1]
- Frequency50 Hz[1]
- DC Power Supply12 / 12 / 12 kW, 208 V[1]
- DC Power Supply6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle - input voltage is 400V)[1]
- ConfigurationCTI Cryo Pumps[1]
- ConfigurationWater Pumps[1]
- ConfigurationUpgrade to MFC vs. needle valve[1]
- ConfigurationNew pressure controller[1]
- Load Lock PumpVarian V 70 Turbo Pump[1]
- ConfigurationNo RF Etch Position[1]
- ConfigurationInstalled Heater for Preheating vs RF Base[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 3290 STQ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3290 STQ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 3290 STQ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 3290 STQ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3290 STQ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3290 STQ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
Last updated Jul 29, 2026.
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