Waferpedia

Tool family

Novellus 3290

NovellusDeposition2 entries
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Models in this family

  1. 3290

    The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

  2. 3290 STQ

All entries

  1. 3290Novellus

    The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

    CategoryDeposition
    2 specs
  2. 3290 STQNovellus
    CategoryDeposition
    15 specs