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OAI

306

UV intensity meterOAI 306 family
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The OAI Model 306 is a handheld UV power meter (radiometer) made by Optical Associates Inc. of Milpitas, California. The OAI 306 measures ultraviolet light intensity in real time, displaying readings in mW/cm² on a large LCD. The OAI 306 operates with a tethered UV probe and offers three measurement modes: NORM (continuous real-time intensity), HOLD (freeze current reading), and PEAK HOLD (capture maximum intensity).[1]

OAI306
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Power

9V Alkaline battery[1]

Optics

365 nm[1]

What it is

The OAI 306 is a handheld UV power meter (radiometer) manufactured by Optical Associates Inc. (OAI) of Milpitas, California. The instrument measures ultraviolet light intensity in real time and displays readings in mW/cm² on a large LCD. The meter operates with a tethered UV probe; this unit includes the 0306-001-04 365 nm probe. Power is supplied by a 9V alkaline battery.[1]

How it works

The OAI 306 offers three measurement modes: NORM for continuous real-time intensity readings, HOLD to freeze the current reading on the display, and PEAK HOLD to capture and hold the maximum intensity recorded during a measurement session. The large LCD provides direct readout in mW/cm².[1]

Where it fits in the process flow

The OAI 306 is a standard instrument in photolithography and semiconductor fabrication, used to measure the UV exposure intensity of mask aligners, contact aligners, and UV lamp systems operating at 365 nm (i-line). Accurate UV dose control directly affects photoresist exposure quality and process repeatability. The meter is commonly found in university cleanrooms, research fabs, MEMS labs, and printed circuit board shops.[1]

Applications

The OAI 306 is used in photolithography and semiconductor fabrication to measure UV exposure intensity of mask aligners, contact aligners, and UV lamp systems. Beyond semiconductor work, it is also employed in UV curing, UV sterilization system verification, and general UV lamp intensity measurement in industrial and scientific settings. The 365 nm wavelength corresponds to the i-line of mercury arc lamps, the workhorse wavelength for contact and proximity photolithography, making this probe the most widely used configuration for aligner qualification, lamp monitoring, and process setup.[1]

  • UV intensity measurement

What do the numbers mean?

Power & electrical1

Power Source
9V Alkaline battery[1]
Accurate?

Optics & imaging2

Manufacturer
OAI (Optical Associates Inc.), Milpitas, California, U.S.A.[1]
Accurate?
Probe Wavelength
365 nm[1]
Accurate?

Configuration & options7

Type
UV Intensity Meter[2]
Accurate?
Listed location/category
MAGNETIC MEASUREMENT DEVICES[2]
Accurate?
Meter Model
OAI 306 UV Powermeter[1]
Accurate?
Probe Model / MPN
0306-001-04[1]
Accurate?
Display
LCD, reads in mW/cm²[1]
Accurate?
Measurement Modes
NORM (real-time intensity), HOLD (freeze reading), PEAK HOLD (maximum intensity captured)[1]
Accurate?
Form Factor
Handheld[1]
Accurate?
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What replaced it?

  • siblingOAI 357Listed alongside OAI 357 as another UV intensity meter.source[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Source9V Alkaline battery[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the form factor of the OAI 306?

The OAI 306 is a handheld UV power meter.[1]

Not publicly documented

The following facts about the 306 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 306 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 306 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 306 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 306 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 306 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]recycledgoods.comrecycledgoods.comrecycledgoods.com
  2. [2]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
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Last updated Sep 2, 2026.

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