OAI
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The OAI 357 is a microprocessor-based UV energy analyzer for wafer steppers. The OAI 357 measures intensity, energy, and time with maximums of 1600 mW/cm2, 4000 mJ/cm2, and 2.5 seconds. The OAI 357 supports 365 and 436 nm wavelengths and includes a 365 nm probe.[1]
The OAI 357 is a UV energy analyzer that measures intensity, energy, and time. The instrument uses a microprocessor to perform measurement, storage, and recall of up to nine series of readings. The OAI 357 has a digital display that provides NIST traceable measurements. The analyzer is designed for use with steppers from ASML, Nikon, and Canon. The OAI 357 covers wavelengths of 365 nm and 436 nm. The unit includes a 365 nm probe.[1]
The OAI 357 operates with push-button controls and provides a digital display that can be frozen. The instrument has detachable probes that can be selected to match the spectral response of various photoresists. The OAI 357 includes an RS-232 output for downloading and recording measurement results. The front panel includes prompts to guide the user. The unit is housed in a rugged aluminum case with a handle and probe pouch.[1]
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The OAI 357 measures UV light at 365 nm and 436 nm wavelengths.[1]
The OAI 357 can measure intensity up to 1600 mW/cm², energy up to 4000 mJ/cm², and time up to 2.5 seconds.[1]
The OAI 357 is designed for use with steppers from ASML, Nikon, and Canon.[1]
Yes, the digital display of the OAI 357 provides NIST traceable measurements.[1]
The OAI 357 has an RS-232 output for downloading and recording measurement results.[1]
Yes, the OAI 357 uses detachable probes that can be selected to match the spectral response of different photoresists.[1]
The following facts about the 357 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 357 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 357 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 357 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 357 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 357 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 1, 2026.