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OAI

357

UV intensity meterOAI 357 family
Research Quality: 40% complete

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The OAI 357 is a microprocessor-based UV energy analyzer for wafer steppers. The OAI 357 measures intensity, energy, and time with maximums of 1600 mW/cm2, 4000 mJ/cm2, and 2.5 seconds. The OAI 357 supports 365 and 436 nm wavelengths and includes a 365 nm probe.[1]

OAI357
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What it is

The OAI 357 is a UV energy analyzer that measures intensity, energy, and time. The instrument uses a microprocessor to perform measurement, storage, and recall of up to nine series of readings. The OAI 357 has a digital display that provides NIST traceable measurements. The analyzer is designed for use with steppers from ASML, Nikon, and Canon. The OAI 357 covers wavelengths of 365 nm and 436 nm. The unit includes a 365 nm probe.[1]

How it works

The OAI 357 operates with push-button controls and provides a digital display that can be frozen. The instrument has detachable probes that can be selected to match the spectral response of various photoresists. The OAI 357 includes an RS-232 output for downloading and recording measurement results. The front panel includes prompts to guide the user. The unit is housed in a rugged aluminum case with a handle and probe pouch.[1]

Where it fits in the process flow

The OAI 357 is specifically intended for use with wafer steppers, including those from ASML, Nikon, and Canon. The instrument can measure intensity up to 1600 mW/cm², energy up to 4000 mJ/cm², and time up to 2.5 seconds. The OAI 357 records the percentage deviation over a series of exposures.[1]

What do the numbers mean?

Wafer handling1

Original application
ASML and GCA (Integrated Solutions) wafer steppers; also for ASML, Nikon, Canon steppers[1]
Accurate?

Optics & imaging2

Wavelengths
365 nm and 436 nm[1]
Accurate?
Probe included
365 nm probe[1]
Accurate?

Configuration & options8

Type
UV intensity meter[2]
Accurate?
Measurement capabilities
Intensity, energy, time[1]
Accurate?
Maximum intensity
1600 mW/cm2[1]
Accurate?
Maximum energy
4000 mJ/cm2[1]
Accurate?
Maximum time
2.5 seconds[1]
Accurate?
Display
Digital display, NIST traceable[1]
Accurate?
Output
RS-232[1]
Accurate?
Housing
Rugged aluminum case with handle and probe pouch[1]
Accurate?
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What replaced it?

  • siblingOAI 306Listed alongside OAI 357 as another UV intensity meter.source[2]
  • siblingOAI 200Listed in the same lithography equipment section.source[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wavelengths does the OAI 357 measure?

The OAI 357 measures UV light at 365 nm and 436 nm wavelengths.[1]

What are the maximum measurement ranges of the OAI 357?

The OAI 357 can measure intensity up to 1600 mW/cm², energy up to 4000 mJ/cm², and time up to 2.5 seconds.[1]

Which stepper manufacturers is the OAI 357 compatible with?

The OAI 357 is designed for use with steppers from ASML, Nikon, and Canon.[1]

Does the OAI 357 provide NIST-traceable measurements?

Yes, the digital display of the OAI 357 provides NIST traceable measurements.[1]

What output interface does the OAI 357 have?

The OAI 357 has an RS-232 output for downloading and recording measurement results.[1]

Is the probe on the OAI 357 detachable?

Yes, the OAI 357 uses detachable probes that can be selected to match the spectral response of different photoresists.[1]

Not publicly documented

The following facts about the 357 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 357 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 357 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 357 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 357 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 357 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]amazon.comamazon.comamazon.com
  2. [2]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
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Last updated Sep 1, 2026.

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