OAI

6000

Research Quality: 40% complete

Plate 01OAI Model 6000 Mask Aligner System
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What is it?

Source text identifies the OAI 6000 as a Model 6000 integrated lithography cell and as a Model 6000 automated front- and backside mask aligner system. It is described as a cluster configuration with dynamic wafer flow and parallel application processing, with a single terminal for control over recipe and program selection, and it is said to support multiple wafer sizes processed simultaneously.

What can it run?

Process applications and technology nodes documented for this tool.

Semiconductors
MEMS
Sensors
Advanced packaging
Microfluidics

What do the numbers mean?

Wafer handling3

Wafer flow: Allows for dynamic wafer flow and parallel application processing^[1]
Wafer handling: Reduced wafer handling^[1]
Wafer size capability: Multiple wafer sizes can be processed simultaneously^[1]

Optics & imaging1

Product class: Automated Front & Backside Mask Aligner^[3]

Control & software1

Control interface: Single terminal for control over recipe and program selection; P9000 performs as the master user interface^[1]

Dimensions & facilities1

Footprint: Small footprint^[1]

Configuration & options7

Product name: Model C&D P9000 / OAI 6000: Integrated Lithography Cell^[1]
System type: Integrated lithography cell^[1]
Process steps: Coat | Bake | Align/Expose | Develop^[1]
Manufacture: Fully manufactured in the USA^[1]; Cluster configuration^[1]
Operator requirement: Fewer operators needed in the lithography module^[1]
Application area: For production semiconductors, MEMS, sensors, advanced packaging, IOT, microfluidics^[3]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 6000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report