Waferpedia

Tool family

Pfeiffer Alcatel

Pfeiffer6 entries
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Models in this family

  1. Alcatel 2012 A Rotary
  2. Alcatel 2033 Rotary Vane

    The Pfeiffer / Alcatel 2033 is a rotary vane pump.

  3. Alcatel 2460

    The Pfeiffer / Alcatel 2460 is a PVD sputter physical vapor deposition system for 6-inch wafers.

  4. Alcatel 601 E DRIE

    The Pfeiffer / Alcatel 601 E DRIE is a Deep Reactive Ion Etch system.

  5. Alcatel ATH 2300 M Turbo
  6. Alcatel Drytel 31 Vacuum

    The Pfeiffer / Alcatel Drytel 31 is a vacuum pump.

All entries

  1. Alcatel 2012 A RotaryPfeiffer
    3 specs
  2. Alcatel 2033 Rotary VanePfeiffer

    The Pfeiffer / Alcatel 2033 is a rotary vane pump.

    1 spec
  3. Alcatel 2460Pfeiffer

    The Pfeiffer / Alcatel 2460 is a PVD sputter physical vapor deposition system for 6-inch wafers.

    CategoryDeposition
    3 specs
  4. Alcatel 601 E DRIEPfeiffer

    The Pfeiffer / Alcatel 601 E DRIE is a Deep Reactive Ion Etch system.

    CategoryEtch
    5 specs
  5. Alcatel ATH 2300 M TurboPfeiffer
    1 spec
  6. Alcatel Drytel 31 VacuumPfeiffer

    The Pfeiffer / Alcatel Drytel 31 is a vacuum pump.

    1 spec