SUSS MicroTec
MCS 8 Spray
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SUSS MicroTec MCS 8 Spray is a spray coater. The SUSS MicroTec MCS 8 Spray is a manual coating and aqueous developing system. The SUSS MicroTec MCS 8 Spray supports configurable coating, developing, baking, and cleaning modules.[1][2]
What it is
What do the numbers mean?
Configuration & options7
- Up to six frames with two modules each[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of equipment is the SUSS MicroTec MCS 8 Spray?
The SUSS MicroTec MCS 8 Spray is a spray coater used in semiconductor manufacturing.[1]
How far can an MCS8 LabCluster be expanded?
The MCS8 LabCluster can be individually configured by combining up to six frames with two modules each. The MCS8 can scale from a single-module system to six frames with twelve modules.[2]
Not publicly documented
The following facts about the MCS 8 Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MCS 8 Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MCS 8 Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MCS 8 Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MCS 8 Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MCS 8 Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]suss.com — suss.comsuss.com
- [3]Inventory photo
- [4]SUSS MicroTec MCS 8 Spray family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.