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SVG

8626 8636

SVG 8626 8636 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SVG 8626 / 8636 is a photoresist coater used in semiconductor manufacturing. The SVG 8626 / 8636 supports 4-inch wafers. The SVG 8626 / 8636 was introduced in 1993.[1][2]

SVG8626 8636
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What it is

The SVG 8626 and SVG 8636 are photoresist coaters used in semiconductor manufacturing. The SVG 8626/8636 supports 4-inch wafers. The SVG 8626/8636 family was introduced in 1993.[1][3][2]

What do the numbers mean?

Wafer handling1

Wafer Size
4 inch[1]
Accurate?

Gas & chemistry1

Tool type
photoresist coater[1]
Accurate?

Configuration & options1

Introduction year
1993[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Tool typephotoresist coater[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment are the SVG 8626 and SVG 8636?

The SVG 8626 and SVG 8636 are photoresist coaters used in semiconductor manufacturing.[1]

What wafer size does the SVG 8626 / 8636 support?

The SVG 8626 / 8636 supports 4-inch wafers.[3][1][2]

When was the SVG 8626 / 8636 family introduced?

The SVG 8626 / 8636 family was introduced in 1993.[2]

Not publicly documented

The following facts about the 8626 8636 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8626 8636 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 8626 8636 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 8626 8636 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 8626 8636 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 8626 8636 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
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Last updated Oct 19, 2026.

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