TEGAL
211
The TEGAL 211 is a table top plasma etcher/asher. The TEGAL 211 handles wafers up to 3 inches in diameter. The TEGAL 211 uses an aluminum chamber with a timer adjustable from 0 to 99 minutes.[1][2]
What is it?
What do the numbers mean?
Wafer handling2
- Refurbished Wafer Prober
- Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]
Optics & imaging1
- Refurbished Mask Aligner
- Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]
Dimensions & facilities1
Configuration & options9
- Refurbished RTP RTA
- AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]
- KLA-Tencor Spare Parts and Service
- RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]
- Refurbished Isotropic Plasma Etcher
- Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]
- Refurbished PECVD, ALD Equipment
- Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 211 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 211 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 211 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 211 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 211 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 211 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]jmind.com — jmind.comjmind.com
- [2]dealer listingsemistarcorp.com
Last updated Oct 11, 2026.
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