Temescal
3CK
Power
Up to 12 kW[2]
Vacuum
5 x 10^-4 torr (6.7 x 10^-4 mbar)[2]
Optics
Electron beam deposition source / e-gun[2]
What it is
The Temescal 3CK is a removable-cover multi-pocket electron-beam evaporation source in the SuperSource family. The Temescal 3CK is rated up to 12 kW. The Temescal 3CK is offered in side-drive and bottom-drive turret-source base-unit configurations. The Temescal 3CK uses removable crucible covers intended to expose only the pocket in evaporation position.[2]
How it works
The Temescal 3CK has a removable top plate and crucible. The Temescal 3CK uses adjustable internal and external polepiece extensions for beam spot control. The Temescal 3CK supports longitudinal and lateral sweep operation when used with a beam sweep controller. The Temescal 3CK uses a removable crucible cover that reduces the risk of cross-contamination by exposing only the pocket in evaporation position. The Temescal 3CK cover can be removed by removing four screws. The Temescal 3CK can accept continuous-trough carousel crucibles, banana-shaped pockets, and skillet-type evaporant holders.[2]
Where it fits in the process flow
General reference — not yet source-verifiedElectron-beam evaporation is a thin-film formation method used after substrate preparation and before later patterning, lift-off, encapsulation, or metrology steps, depending on the device flow. Electron-beam evaporation tools are typically chosen where a vacuum-deposited metallic, dielectric, or optical coating must be formed from an evaporant source.
Applications
General reference — not yet source-verifiedElectron-beam evaporation sources are used for thin films in semiconductor, optics, and other vacuum coating work where materials can be evaporated from a crucible and deposited onto a target surface. Multi-pocket sources are useful when a process benefits from changing evaporant materials or using different crucible arrangements within the same chamber setup.
- Electron beam deposition
- Wide variety of coating applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Cross-contamination risk is reduced by the crucible cover exposing only the pocket in evaporation position.
What do the numbers mean?
Power & electrical6
Vacuum & pumping4
Wafer handling1
- Evaporation rate example
- 25 kA of aluminum at 10-in. (254-mm) source-to-substrate distance[2]
Optics & imaging1
Control & software1
Dimensions & facilities5
Configuration & options10
- Crucible configurations stated for 3CK
- 4 x 40cc; 4 x 60cc; 6 x 20cc; 6 x 25cc; 4 x 25cc + 2 x 15cc; 5 x 25cc + 1 x 15cc; 325 cc skillet[2]
Vintage & configurations
- 2021-03Manual revision B[1]
Rev. B manual dated March 2021.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Temescal 3CK | — | — | Rated up to 12 kW. | web.archive.org[2] |
| Temescal 2CK | — | — | Rated up to 10 kW. | web.archive.org[2] |
| Temescal 1CK | — | — | Rated up to 8 kW. | web.archive.org[2] |
| 3CK | — | — | Rated up to 12 kW; offered with side or bottom drive; available with multiple crucible configurations and removable crucible covers. | web.archive.org[2] |
| 2CK | — | — | Referenced as a related Temescal SuperSource model rated up to 10 kW. | web.archive.org[2] |
| 1CK | — | — | Referenced as a related Temescal SuperSource model rated up to 8 kW. | web.archive.org[2] |
What replaced it?
Related models
- siblingTemescal 2CK— Listed alongside the 3CK as another SuperSource option.source[2]
- siblingTemescal 1CK— Listed alongside the 3CK as another SuperSource option.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Rated powerUp to 12 kW[2]
- Max power8 kW[2]
- Acceleration voltage4-10 kV[2]
- Operating pressure maximum5 x 10^-4 torr (6.7 x 10^-4 mbar)[2]
- Operating pressure minimum1 x 10^-4 torr (1.33 x 10^-4 mbar)[2]
- Filament current70 A at 12 V ac[2]
- Emission current0-1.5 A at 4-10 kV dc (8 kW max.)[2]
- Power ratingUp to 12 kW[2]
- Cooling water max inlet pressure100 psi (6.89 bar)[2]
- Cooling water minimum delta pressure50 psi (3.45 bar)[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 3CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 3CK are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 3CK is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3CK are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 3CK are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [2]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 16, 2026.