Temescal

3CK

E-gun Temescal 3CK family

Research Quality: 40% complete

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3CK — web.archive.org — Fig. 013CKweb.archive.org^[1]

Power

Up to 12 kW^[1]

Vacuum

5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]

Optics

Electron beam deposition source / e-gun^[1]

What is it?

The source is described as a Temescal SuperSource e-gun with removable crucible covers for reduced cross-contamination and easier in-situ cleaning and replenishment. The 3CK option is rated up to 12 kW and is offered with side-drive or bottom-drive base units, multiple crucible configurations, and related accessories.

What can it run?

Process applications and technology nodes documented for this tool.

Electron beam deposition
Wide variety of coating applications

What do the numbers mean?

Power & electrical5

Rated power: Up to 12 kW^[1]
Max power: 8 kW^[1]
Acceleration voltage: 4-10 kV^[1]
Filament current: 70 A at 12 V ac^[1]
Emission current: 0-1.5 A at 4-10 kV dc (8 kW max.)^[1]

Vacuum & pumping2

Operating pressure maximum: 5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]
Operating pressure minimum: 1 x 10^-4 torr (1.33 x 10^-4 mbar)^[1]

Wafer handling1

Evaporation rate example: 25 kA of aluminum at 10-in. (254-mm) source-to-substrate distance^[1]

Optics & imaging1

Type: Electron beam deposition source / e-gun^[1]

Control & software1

Sweep capability: Longitudinal and lateral when operated with a beam sweep controller^[1]

Dimensions & facilities3

Dimensions: See illustration^[1]
Weight: 23.5 lbs. (10.7 kg)^[1]
Rotation torque: 10 in.-lbs. (11.5 kg-cm)^[1]

Configuration & options7

Model: 3CK SuperSource^[1]
Crucible cover: Removable crucible cover^[1]
Drive options: Side drive or bottom drive^[1]
Crucible configurations stated for 3CK: 4 x 40cc; 4 x 60cc; 6 x 20cc; 6 x 25cc; 4 x 25cc + 2 x 15cc; 5 x 25cc + 1 x 15cc; 325 cc skillet^[1]
Max bakeout temperature: 302 F (150 C)^[1]
Deflection: 270 degrees^[1]
Spot size/shape: From tight oval to diffuse oblong^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Temescal 3CK	—	—	Rated up to 12 kW.	web.archive.org^[1]
Temescal 2CK	—	—	Rated up to 10 kW.	web.archive.org^[1]
Temescal 1CK	—	—	Rated up to 8 kW.	web.archive.org^[1]
3CK	—	—	Rated up to 12 kW; offered with side or bottom drive; available with multiple crucible configurations and removable crucible covers.	web.archive.org^[1]
2CK	—	—	Referenced as a related Temescal SuperSource model rated up to 10 kW.	web.archive.org^[1]
1CK	—	—	Referenced as a related Temescal SuperSource model rated up to 8 kW.	web.archive.org^[1]

Interested in this tool?

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What replaced it?

siblingTemescal 2CK— Listed alongside the 3CK as another SuperSource option.source^[1]
siblingTemescal 1CK— Listed alongside the 3CK as another SuperSource option.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Rated powerUp to 12 kW^[1]
Max power8 kW^[1]
Acceleration voltage4-10 kV^[1]
Operating pressure maximum5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]
Operating pressure minimum1 x 10^-4 torr (1.33 x 10^-4 mbar)^[1]
Filament current70 A at 12 V ac^[1]
Emission current0-1.5 A at 4-10 kV dc (8 kW max.)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 3CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3CK are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 3CK are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3CK are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3CK is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3CK are on record.
Answerable by: an OEM parts catalog or a service engineer