Temescal
2CK
The Temescal 2CK is a removable-cover multi-pocket electron-beam source. The Temescal 2CK is rated up to 10 kW. The Temescal 2CK has side or bottom drive options.[1][2]
What it is
The Temescal 2CK is a standard multi-pocket electron-beam gun in the SuperSource line for electron beam deposition. The Temescal 2CK has a removable crucible cover. The Temescal 2CK is rated up to 10 kW. The Temescal 2CK is offered in side-drive and bottom-drive base-unit configurations.[1]
How it works
The Temescal 2CK uses a crucible cover that exposes only the pocket in evaporation position, which reduces the risk of cross-contamination. The Temescal 2CK crucible cover can be removed for source replenishment and for in situ cleaning of the crucible and adjacent structures. The Temescal 2CK has adjustable internal and external polepiece extensions for beam spot control. The Temescal 2CK has a deflection angle of 270°. The Temescal 2CK supports longitudinal and lateral sweep capability when operated with a beam sweep controller.[1]
Where it fits in the process flow
General reference — not yet source-verifiedElectron-beam evaporation tools are used in thin-film process modules after substrate preparation and before later patterning, lift-off, etch, or packaging steps, depending on the device flow. Electron-beam evaporation is commonly chosen where a process needs vacuum-deposited films from materials that are difficult to heat efficiently with simpler resistive sources. Multi-pocket source hardware fits chambers that need material flexibility without breaking vacuum between successive depositions.
Applications
The Temescal 2CK is intended for a wide variety of coating applications. The Temescal 2CK is used for electron beam deposition. The Temescal 2CK is available with numerous multi-pocket crucible configurations, including pocketed crucibles, banana-shaped crucibles, carousel crucibles, and skillet-type evaporant holders.[1]
- Electron beam deposition
- Wide variety of coating applications
What do the numbers mean?
Power & electrical6
Vacuum & pumping3
- Operating pressure
- Maximum 5 × 10^-4 torr (6.7 × 10^-4 mbar); minimum 1 × 10^-4 torr (1.33 × 10^-4 mbar)[1]
Control & software1
Dimensions & facilities4
Configuration & options11
Vintage & configurations
- 1996-07-22Production start[2]
First released version of the manual for model STIH-270-2CK/2CKB sources began with SN 1.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Temescal 3CK | — | — | Rated up to 12 kW. | web.archive.org[1] |
| Temescal 2CK | — | — | Rated up to 10 kW. | web.archive.org[1] |
| Temescal 1CK | — | — | Rated up to 8 kW. | web.archive.org[1] |
| 3CK SuperSource | — | — | Rated up to 12 kW and offered with multiple crucible configurations. | web.archive.org[1] |
| 1CK SuperSource | — | — | Rated up to 8 kW and offered with smaller crucibles in 4x7cc and 6x4cc pocket configurations. | web.archive.org[1] |
What replaced it?
Related models
- siblingTemescal 3CK— Listed alongside the 3CK as another SuperSource option.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Rated powerup to 10 kW[1]
- Acceleration voltage4–10 kV[1]
- Operating pressureMaximum 5 × 10^-4 torr (6.7 × 10^-4 mbar); minimum 1 × 10^-4 torr (1.33 × 10^-4 mbar)[1]
- Filament current70 A at 12 V ac[1]
- Emission current0–1.5 A at 4–10 kV dc (8 kW max.)[1]
- Cooling water max inlet pressure100 psi (6.89 bar)[1]
- Cooling water min delta pressure50 psi (3.45 bar)[1]
- High-voltage feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A[1]
- Octal feedthroughOne octal feedthrough rated for 110 V at 3 A per lead[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Temescal 2CK rated power?
The Temescal 2CK is rated up to 10 kW.[1]
What drive configurations are offered for the Temescal 2CK?
The Temescal 2CK is offered in side-drive and bottom-drive configurations.[1]
What crucible cover options are offered for the Temescal 2CK?
The Temescal 2CK has 4-pocket, 6-pocket, and 8-pocket crucible cover options for the STIH-270-2CK.[1]
What features does the removable crucible cover provide on the Temescal 2CK?
The crucible cover exposes only the pocket in evaporation position to reduce the risk of cross-contamination. The crucible cover can be removed for source replenishment and for in situ cleaning of the crucible and adjacent structures.[1]
Not publicly documented
The following facts about the 2CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 2CK are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2CK are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2CK is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2CK are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 2CK are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
Last updated Oct 16, 2026.