Waferpedia

Temescal

2CK

E-gunTemescal 2CK family
Research Quality: 40% complete
2CK — web.archive.org
Fig. 012CKweb.archive.org[1]

Power

up to 10 kW[1]

Vacuum

100 psi (6.89 bar)[1]

What is it?

The source describes the Temescal Model 2CK as part of the SuperSource line of standard multi-pocket e-guns for electron beam deposition. It states that the 2CK has a removable crucible cover, side or bottom drive options, and available crucible configurations including multiple pocket, carousel, banana-shaped pocket, and skillet types.

What can it run?

Process applications and technology nodes documented for this tool.

  • Electron beam deposition
  • Wide variety of coating applications

What do the numbers mean?

Power & electrical6

Rated power
up to 10 kW[1]
Accurate?
Acceleration voltage
4–10 kV[1]
Accurate?
Filament current
70 A at 12 V ac[1]
Accurate?
Emission current
0–1.5 A at 4–10 kV dc (8 kW max.)[1]
Accurate?
High-voltage feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A[1]
Accurate?
Octal feedthrough
One octal feedthrough rated for 110 V at 3 A per lead[1]
Accurate?

Vacuum & pumping3

Operating pressure
Maximum 5 × 10^-4 torr (6.7 × 10^-4 mbar); minimum 1 × 10^-4 torr (1.33 × 10^-4 mbar)[1]
Accurate?
Cooling water max inlet pressure
100 psi (6.89 bar)[1]
Accurate?
Cooling water min delta pressure
50 psi (3.45 bar)[1]
Accurate?

Dimensions & facilities3

Weight
23.5 lbs (10.7 kg)[1]
Accurate?
Cooling water maximum temperature
68 °F (20 °C)[1]
Accurate?
Cooling water flow rate
2.75 gpm (0.17 l/sec.)[1]
Accurate?

Configuration & options7

Model
2CK SuperSource[1]
Accurate?
Crucible cover
Removable cover[1]
Accurate?
Drive options
Side or bottom drive[1]
Accurate?
Deflection
270°[1]
Accurate?
Max bakeout temperature
302 °F (150 °C)[1]
Accurate?
Dual-pass feedthrough
One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1]
Accurate?
Rotary feedthrough
One rotary-motion feedthrough with 1/4-in. (6.4-mm) diameter shaft[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Temescal 3CKRated up to 12 kW.web.archive.org[1]
Temescal 2CKRated up to 10 kW.web.archive.org[1]
Temescal 1CKRated up to 8 kW.web.archive.org[1]
3CK SuperSourceRated up to 12 kW and offered with multiple crucible configurations.web.archive.org[1]
1CK SuperSourceRated up to 8 kW and offered with smaller crucibles in 4x7cc and 6x4cc pocket configurations.web.archive.org[1]
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What replaced it?

  • siblingTemescal 3CKListed alongside the 3CK as another SuperSource option.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Rated powerup to 10 kW[1]
  • Acceleration voltage4–10 kV[1]
  • Operating pressureMaximum 5 × 10^-4 torr (6.7 × 10^-4 mbar); minimum 1 × 10^-4 torr (1.33 × 10^-4 mbar)[1]
  • Filament current70 A at 12 V ac[1]
  • Emission current0–1.5 A at 4–10 kV dc (8 kW max.)[1]
  • Cooling water max inlet pressure100 psi (6.89 bar)[1]
  • Cooling water min delta pressure50 psi (3.45 bar)[1]
  • High-voltage feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A[1]
  • Octal feedthroughOne octal feedthrough rated for 110 V at 3 A per lead[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 2CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2CK are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 2CK are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2CK are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2CK is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 2CK are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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