Waferpedia

Varian

20L 100V 200W Ion Pump Set

Varian 20L 100V 200W Ion Pump Set family
Research Quality: 30% complete
20L 100V 200W Ion Pump Set — Inventory photo
Fig. 0120L 100V 200W Ion Pump SetInventory photo[1]

What is it?

Varian 20L 100V 200W Ion Pump Set is a sold-as-set pair of 20 litre ion pumps with magnet and 304 LN ESR fitting.

What do the numbers mean?

Vacuum & pumping1

911-5036 20 Litre Ion Pumps with Magnet[1]
Accurate?

Configuration & options3

Varian 304 LN ESR Fitting[1]
Accurate?
Hitachi SEM Compatible S-4200, S-4500[1]
Accurate?
Sold as set (2), in good working condition[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration911-5036 20 Litre Ion Pumps with Magnet[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 20L 100V 200W Ion Pump Set are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 20L 100V 200W Ion Pump Set are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 20L 100V 200W Ion Pump Set are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 20L 100V 200W Ion Pump Set are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 20L 100V 200W Ion Pump Set are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 20L 100V 200W Ion Pump Set is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →