Waferpedia

YES

1224

DepositionYES 1224 family
Research Quality: 40% complete
1224 — web.archive.org
Fig. 011224web.archive.org[1]

What is it?

YES identifies the YES-1224 as a silane vapor deposition system and states that it is suitable for silane coating for MEMS and other precise surface modification applications. The company also describes the YES-1224 and YES-1224P as chemical vapor deposition systems ideally suited for surface coating of MEMS devices.

What can it run?

Process applications and technology nodes documented for this tool.

  • Silane coating for MEMS
  • MEMS device packaging
  • Precise surface modification
  • Semiconductor surface modification
  • Copper capping
  • BioMEMS packaging
  • Glass slide surface modification
  • DNA and oligonucleotide adhesion

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Stiction in MEMS device packaging is described as reduced by hydrophobic coating

What do the numbers mean?

Gas & chemistry1

Equipment type
Chemical vapor deposition system[3]
Accurate?

Configuration & options3

Model
YES-1224[3]
Accurate?
Application
Silane coating for MEMS device packaging[3]
Accurate?
Process characteristic
Controls the functionalization process so results are precisely reproducible, run-to-run[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
YES-1224Pweb.archive.org[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Equipment typeChemical vapor deposition system[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 1224 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1224 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 1224 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 1224 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 1224 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the 1224 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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