Waferpedia

YES

8TA

YES8TA
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Wafer size

5-6 in. wafers; 8 in. wafers; 12 in. wafers

Performance

2 full loads/hr.[2]

What is it?

The YES-8TA appears in the product list as a vacuum bake/vapor prime and image reversal system. The product chart states that it is a dual function system with capacity for 8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers, and that it is designed for image reversal and HMDS priming use.

What can it run?

Process applications and technology nodes documented for this tool.

  • Vacuum bake
  • Vapor prime
  • Image reversal

What do the numbers mean?

Wafer handling3

Capacity
8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers[2]
Accurate?
Cleanliness
< 5 x 1 micron particles per 6-in. wafer[2]
Accurate?
HMDS usage
<5 ml/200 wafers (75 prime cycles/pint)[2]
Accurate?

Performance1

Throughput
2 full loads/hr.[2]
Accurate?

Configuration & options2

Function
Dual function VB/VP & image reversal[1]
Accurate?
Temperature
160°C max[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 8TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8TA are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 8TA are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 8TA are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 8TA are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 8TA is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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