YES
The YES-10TA is a dual function vacuum bake/vapor prime and image reversal system. The YES-10TA has a capacity of 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers. The YES-10TA achieves a cleanliness of less than 10x1 micron particles per 4-inch wafer.[1][2]
Wafer size
4 in. wafers; 5-8 in. wafers
Performance
(2) 1/2 loads/hr.[2]
Image reversal reverses the action of positive photoresist so that negative images can be formed, allowing negative imaging with the resolution and ease of processing that positive resist provides.[2]
The YES-10TA operates at a maximum temperature of 160°C for general processing, and at 90°C for the image reversal process specifically.[2]
Image reversal is commonly used to create negative-tone images from positive resist, enabling lift-off processes for metal lines and other geometries where a re-entrant resist profile is desired.
Image reversal is used by mask makers to allow the use of dark-field reticles in situations where a light-field reticle would cause chrome spots on the mask.[2]
The technique is employed in wafer fabrication for metal lift-off, particularly for small-geometry metal lines on gallium arsenide, lithium niobate, indium phosphide, and other unusual substrate materials.[2]
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
No research found yet — worked with this tool? Share what you know.
The following facts about the 10TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 10TA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 10TA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 10TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 10TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 10TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Aug 13, 2026.