Waferpedia

Wafer size

5"

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2 entries

  1. 4-pocketTemescal

    Temescal 4-pocket e-beam evaporation systems are used for vacuum deposition, including thin dielectric films and metal deposition.

    CategoryDepositionWafer5"
  2. CV-6SXLTemescal

    The Temescal CV-6SXL is an electron-beam evaporation system used for controlled deposition of thin dielectric films.

    CategoryDepositionWafer5"