Hitachi
Regulus8100 alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
.498 PSL Wafer
Metrology & Inspection
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
Applied Materials
0010-18024 Pyrometer Assembly
Metrology & Inspection
KLA
0035235-003 MMD Head
Metrology & Inspection
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.
KLA
1.112 PSL Wafer
Metrology & Inspection
The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.
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