SSEC
300 ML Evergreen Series III Wafer Mask alternatives
Comparable Wet Processing / Clean equipment documented in the Waferpedia catalog.
6 comparable tools
YES
1000FP
Wet Processing / Clean
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
YES
1000P
Wet Processing / Clean
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
Hitachi
1305 BSG 3
Wet Processing / Clean
Hitachi
16036 N
Wet Processing / Clean
The Hitachi 16036 N is a clean bench system.
Electrovert
200 Cleaning
Wet Processing / Clean
EV Group
301
Wet Processing / Clean
The EVG 301 is a semi-automated single wafer cleaning system for R&D, featuring megasonic cleaning, spinner rotation up to 3000 rpm, and optional pre-bonding and IR-inspection modules.
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