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Tool family

ABM 3 HR Mask Aligner UV Exposure

ABMLithography1 entry

ABM 3 HR Mask Aligner UV Exposure System.

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Models in this family

  1. 3 HR Mask Aligner UV Exposure

    The ABM 3 HR Mask Aligner / UV Exposure System is a mask aligner with a precision alignment stage, a 4" x 4" mask holder, and a splitfield Zeiss microscope.