ABM Mask

Models in this family

1. 

   Mask

   ABM Mask Aligner is a lithography mask aligner described with wafer sizes from 2 to 12 inches and a 1000 Watt DUV light source.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ABM3000HR Mask Aligner	—	—	Manual mask aligner with top-side alignment and substrate capability from 100 mm down to small pieces; requires a 5 inch mask or 5 inch glass plate with film mask.	wiki.nano.upenn.edu[1]
   ABM Mask Contact Aligner	—	—	Supports front-side and backside alignment, exposure methods including flood, soft, hard, and vacuum contact, and substrates up to 150 mm diameter.	nist.gov[2]

Sources