Waferpedia

Tool family

Advantest F 5112 E-Beam Lithography

AdvantestLithography1 entry

Advantest F 5112 E-Beam Lithography System.

LinkedIn X Email

Models in this family

  1. F 5112 E-Beam Lithography

    The Advantest F 5112 is an e-beam lithography system specified for 3-inch wafers.