Aixtron AIX

Models in this family

1. AIX G 10

   The Aixtron AIX G 10 is a chemical vapor deposition (CVD) system with a 6-inch wafer size.

2. 

   AIX G 4

   The Aixtron AIX G 4 is a 4-inch deposition system for GaN epitaxy processes.

3. 

   AIX G 5 + C

   The Aixtron AIX G 5 + C is a deposition equipment model.

4. 

   AIX G 5 WW EPI Reactor

   The Aixtron AIX G 5 WW EPI Reactor is an epitaxial silicon deposition system for 4-inch wafers.

5. 

   AIX R 6 MOCVD

   The Aixtron AIX R 6 is a metal organic chemical vapor deposition system.