Waferpedia

Tool family

AJA A300

AJADeposition1 entry

AJA A300 is an A300 Series modular magnetron sputtering source used in Orion-series sputtering systems.

Models in this family

  1. AJA A300 is an A300 Series modular magnetron sputtering source used in Orion-series sputtering systems.

    Cited variants

    DesignationGenerationVintageChangesSource
    A300-XPUHV magnetron sputtering source in 2-inch and 3-inch sizesweb.archive.org[1]
    A300-XP-OUHV magnetron sputtering source designed specifically to fit cluster flanges for compact Orion systems; 2-inch and 3-inch target sizesweb.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org