AJA

A300

Deposition up to 6 in diameter AJA A300 family

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AJAA300

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Plate 01A300 with 270 deg dies
ReedMachineryWatch on YouTube
Plate 02The A300 Vs The A350 – How Airbus’ Oldest Aircraft Compares To Its Newest
Simple FlyingWatch on YouTube

What is it?

The sources describe AJA's A300 Series as modular magnetrons used in Orion and ATC Orion sputtering systems, with A300-XP and A300-XP-O variants identified for UHV use. The Orion systems are compact sputtering systems that use these sources in 2-inch and 3-inch sizes and can be fitted with heating and cooling stages for substrates up to 6 inches in diameter.

What can it run?

Process applications and technology nodes documented for this tool.

sputtering

What do the numbers mean?

Wafer handling1

Substrate size: up to 6 in diameter^[1]

Configuration & options6

Source family: A300 Series modular magnetrons^[1]
Use in systems: used in Orion-series sputtering systems^[1]
Target sizes: 2 in and 3 in^[1]
System environment: HV and UHV^[1]
Temperature range: cooled LN2 to 1000 C^[1]
Magnet array modes: nearly-balanced, unbalanced, and magnetic material modes^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
A300-XP	—	—	UHV magnetron sputtering source in 2-inch and 3-inch sizes	web.archive.org^[1]
A300-XP-O	—	—	UHV magnetron sputtering source designed specifically to fit cluster flanges for compact Orion systems; 2-inch and 3-inch target sizes	web.archive.org^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the A300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the A300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the A300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the A300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the A300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the A300 are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]ATC Orion Series Sputtering Systems — web.archive.orgweb.archive.org
[3]ATC Orion Sputtering Systems - AJA International, Inc. — web.archive.orgweb.archive.org