Waferpedia

Tool family

AJA A300-XP

AJADeposition1 entry

The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.

Models in this family

  1. The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.

    Cited variants

    DesignationGenerationVintageChangesSource
    A320-XPTypical 2" UHV source with in-situ tilt, pneumatic shutter, gas ring, conical chimney, and integral gas injection.web.archive.org[1]
    A330-XPUHV magnetron sputter source with in-situ tilt shown in a con-focal orientation for uniform deposition onto 150 mm diameter substrates.web.archive.org[1]
    A340-XP4" target UHV magnetron sputtering source on 8" CF rotatable flange with chimney, gas ring, and pneumatic shutter.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org