Tool family
The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.
The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| A320-XP | — | — | Typical 2" UHV source with in-situ tilt, pneumatic shutter, gas ring, conical chimney, and integral gas injection. | web.archive.org[1] |
| A330-XP | — | — | UHV magnetron sputter source with in-situ tilt shown in a con-focal orientation for uniform deposition onto 150 mm diameter substrates. | web.archive.org[1] |
| A340-XP | — | — | 4" target UHV magnetron sputtering source on 8" CF rotatable flange with chimney, gas ring, and pneumatic shutter. | web.archive.org[1] |