Tool family
The AJA A3CV is a magnetron sputtering source line with a common source head subassembly that accepts multiple target modules and is offered in HV and UHV mounting versions.
The AJA A3CV is a magnetron sputtering source line with a common source head subassembly that accepts multiple target modules and is offered in HV and UHV mounting versions.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| A3CV series | — | — | Available in HV and UHV mounting versions; optional gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies are mentioned. | web.archive.org[1] |
| 2" version | — | — | Shown as a source variation with manual tilt and gas injection chimney. | web.archive.org[1] |
| 2.5" version | — | — | Shown on a 6" CF flange with gas injection chimney. | web.archive.org[1] |
| 3" magnetic material version | — | — | Shown as a magnetic material version. | web.archive.org[1] |
| 2" module | — | — | Shown as a source variation. | web.archive.org[1] |
| magnetic version core | — | — | Shown as a source variation. | web.archive.org[1] |
| magnetic version module | — | — | Shown as a source variation. | web.archive.org[1] |
| 2 in version | — | — | Shown as a source variation with manual tilt and gas injection chimney. | web.archive.org[1] |
| 2.5 in version | — | — | Shown on a 6 in CF flange with gas injection chimney. | web.archive.org[1] |
| 3 in magnetic material version | — | — | Shown as a magnetic material version. | web.archive.org[1] |
| 2 in module | — | — | Shown as a module variation. | web.archive.org[1] |