AJA

A3CV

Research Quality: 40% complete

What is it?

The AJA A3CV series magnetron sputtering sources are described as an R&D-oriented line that can fit multiple target modules onto a common source head subassembly, allowing different target sizes without using multiple sources. The sources are available in both HV and UHV mounting versions, are RF and DC compatible, and can optionally use gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies. The line also features AJA's modular magnet array.

What can it run?

Process applications and technology nodes documented for this tool.

R&D applications
sputtering various size targets

What do the numbers mean?

Power & electrical2

Compatibility: RF and DC compatible^[1]
Optional features: gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies^[1]

Configuration & options6

Source series: A3CV series^[1]
Type: magnetron sputtering sources^[1]
Mounting versions: HV and UHV mounting versions^[1]
Target architecture: multiple target modules onto a common source head subassembly^[1]
Target sizes mentioned: large magnetic, small precious metal, standard size, and custom size targets^[1]
Magnet array: AJA modular magnet array^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
A3CV series	—	—	Available in HV and UHV mounting versions; optional gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies are mentioned.	web.archive.org^[1]
2" version	—	—	Shown as a source variation with manual tilt and gas injection chimney.	web.archive.org^[1]
2.5" version	—	—	Shown on a 6" CF flange with gas injection chimney.	web.archive.org^[1]
3" magnetic material version	—	—	Shown as a magnetic material version.	web.archive.org^[1]
2" module	—	—	Shown as a source variation.	web.archive.org^[1]
magnetic version core	—	—	Shown as a source variation.	web.archive.org^[1]
magnetic version module	—	—	Shown as a source variation.	web.archive.org^[1]
2 in version	—	—	Shown as a source variation with manual tilt and gas injection chimney.	web.archive.org^[1]
2.5 in version	—	—	Shown on a 6 in CF flange with gas injection chimney.	web.archive.org^[1]
3 in magnetic material version	—	—	Shown as a magnetic material version.	web.archive.org^[1]
2 in module	—	—	Shown as a module variation.	web.archive.org^[1]

Interested in this tool?

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What replaced it?

siblingAJA A300-XP— The A3CV series is described alongside the A300-XP series and as featuring the same modular magnet array.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

CompatibilityRF and DC compatible^[1]
Optional featuresgas injection chimneys, source head tilt gimbals, integral shutters, and power supplies^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of sputtering source is the A3CV series?

It is a UHV magnetron sputtering source.^[3]^[1]^[2]

What source design feature is highlighted across the family?

A modular magnet array isolated from the cooling water is highlighted, and the arrangement can be accessed for different magnetron configurations and deposition modes.^[3]^[1]^[2]

Not publicly documented

The following facts about the A3CV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the A3CV are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the A3CV are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the A3CV are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the A3CV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the A3CV are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]web.archive.org — web.archive.orgweb.archive.org
[3]HV R&D SPUTTERING SOURCES: STILETTO SERIES - AJA International — web.archive.orgweb.archive.org