Waferpedia

Tool family

AJA ATC Orion

AJADeposition1 entry

The AJA ATC Orion 8 UHV Sputtering System is a physical vapor deposition tool that deposits films on a substrate using magnetron sputtering.

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Models in this family

  1. ATC Orion

    The AJA ATC Orion 8 UHV Sputtering System is a physical vapor deposition tool that deposits films on a substrate using magnetron sputtering.