AJA
ATC Orion
Plate 01Magnetron Sputtering Demonstration with ATC Orion 5 UHV
UW Clean Energy InstituteWatch on YouTube
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Corrosion resistant coatings
- Low friction coatings
- Hard, wear resistant coatings
- Coatings with specific electrical and optical properties
What do the numbers mean?
Power & electrical2
Vacuum & pumping1
Wafer handling1
Gas & chemistry1
Control & software1
Configuration & options4
- Magnetron sputtering sources
- Stiletto (HV) magnetron sputtering source; A330-XP-O (UHV) magnetron sputtering source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- AJA ATC Orion 8 sputtering tool SOP.pdfSOPumd.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the ATC Orion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATC Orion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATC Orion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATC Orion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATC Orion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATC Orion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]pnf.uchicago.edu — pnf.uchicago.edupnf.uchicago.edu
- [2]Equipment Capabilities - Electrical & Computer Engineering — ece.utoronto.caece.utoronto.ca
- [3]DEP-09: AJA ATC Orion 8 Sputtering system | Equipment | Maryland NanoCenter FabLab — nanocenter.umd.edunanocenter.umd.edu
- [4]Cleanroom Facilities | Shared Equipment Authority (SEA) | Office of Research | Rice University — research.rice.eduresearch.rice.edu
- [5]Sputter: Twin Chamber [AJA-sputter] | Quantum-Nano Fabrication and Characterization Facility | University of Waterloo — uwaterloo.cauwaterloo.ca
- [6]HV & UHV Sputter Sources for R&D Sputtering Systems — m.ajaint.com (Jul 14, 2020)web.archive.org
Last updated Jul 29, 2026.
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