Waferpedia

Tool family

AJA NT-80

AJADeposition1 entry

The AJA NT-80 is a Nautilus Series rotating magnetron with a configurable magnet array for optimizing target utilization, uniformity, or intentional non-uniformity.

Models in this family

  1. The AJA NT-80 is a Nautilus Series rotating magnetron with a configurable magnet array for optimizing target utilization, uniformity, or intentional non-uniformity.